TRANSPARENT CARBON-FILM PREPARED BY MASS-SEPARATED NEGATIVE-CARBON-ION-BEAM DEPOSITION

被引：131
作者：
ISHIKAWA, J
TAKEIRI, Y
OGAWA, K
TAKAGI, T
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 07期
关键词：
D O I：
10.1063/1.337925
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：2509 / 2515
页数：7
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