THEORETICAL-ANALYSIS OF THE ELECTRODE SHEATH IN RF DISCHARGES

被引：73

作者：

RIEMANN, KU

机构：

来源：

关键词：

D O I：

10.1063/1.343003

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：999 / 1004

页数：6

共 19 条

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