AN EXPERIMENTAL AND THEORETICAL-STUDY OF GROWTH IN HORIZONTAL EPITAXIAL REACTORS

被引：15

作者：

CHINOY, PB ^{[1
]}

AGNELLO, PD ^{[1
]}

GHANDHI, SK ^{[1
]}

机构：

[1] RENSSELAER POLYTECH INST,DEPT ELECT COMP & SYST ENGN,TROY,NY 12180

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1988年 / 17卷 / 06期

关键词：

D O I：

10.1007/BF02652099

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：493 / 499

页数：7

共 50 条

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