AN EXPERIMENTAL AND THEORETICAL-STUDY OF GROWTH IN HORIZONTAL EPITAXIAL REACTORS

被引：15
|
作者：
CHINOY, PB [1 ]
AGNELLO, PD [1 ]
GHANDHI, SK [1 ]
机构：
[1] RENSSELAER POLYTECH INST,DEPT ELECT COMP & SYST ENGN,TROY,NY 12180
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1988年 / 17卷 / 06期
关键词：
D O I：
10.1007/BF02652099
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：493 / 499
页数：7
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