EFFECT OF SUBSTRATE-TEMPERATURE ON MAGNETIC AND MICROSTRUCTURAL PROPERTIES OF SPUTTERED CO-CR FILMS WITH PERPENDICULAR MAGNETIC-ANISOTROPY

被引：4
作者：
UCHIYAMA, Y
SATO, H
KITAMOTO, Y
机构：
[1] R&D Center, Digital Equipment Corporation Japan, Hodogaya-Ku
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1992年 / 28卷 / 05期
关键词：
D O I：
10.1109/20.179391
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Abstract-Co-22 at.%Cr films with perpendicular magnetic anisotropy have been sputter-deposited onto glass substrates at various substrate temperatures from room temperature to 230-degrees-C. Microstructural analyses have revealed that Co-Cr films desposited at high substrate temperatures are composed of at least two regions differing in crystallinity, implying a microscopic stratified nature along the film thickness. Correlation of such a microstructure with a segregation mechanism and resultant magnetic properties is described. Further discussion has been made of the origin of the perpendicular magnetic anisotropy.
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页码：2010 / 2017
页数：8
相关论文
共 37 条
[1]   MAGNETIC INTERFACE ANISOTROPY IN PD/CO AND PD/FE MULTILAYERS [J].
DRAAISMA, HJG ;
DEJONGE, WJM ;
DENBROEDER, FJA .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1987, 66 (03) :351-355
[2]   PERPENDICULAR ANISOTROPY OF EVAPORATED MAGNETIC FILMS [J].
FUJIWARA, H ;
SUGITA, Y .
IEEE TRANSACTIONS ON MAGNETICS, 1968, MAG4 (01) :22-&
[3]  
FURUYA N, 1983, P TECH GROUP MAGN RE, P1
[4]   INFLUENCE OF ATMOSPHERIC GAS ON MAGNETIC-PROPERTIES OF CO-CR FILMS PREPARED BY VACUUM DEPOSITION [J].
FUTAMOTO, M ;
HONDA, Y ;
YOSHIDA, K .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1988, 74 (02) :134-142
[5]   THE ROLE OF ATOMIC MOBILITY DURING FILM GROWTH IN THE STRUCTURAL AND MAGNETIC-PROPERTIES OF COCR [J].
GLOCKER, DA ;
YETTER, WE ;
GAU, JS .
IEEE TRANSACTIONS ON MAGNETICS, 1986, 22 (05) :331-333
[6]   FLAT FERROMAGNETIC EPITAXIAL 48NI/52FE(111) FILMS OF FEW ATOMIC LAYERS [J].
GRADMANN, U ;
MULLER, J .
PHYSICA STATUS SOLIDI, 1968, 27 (01) :313-&
[7]   MAGNETIC SURFACE ANISOTROPIES [J].
GRADMANN, U .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1986, 54-7 (Pt 2) :733-736
[8]   ELECTRON-MICROSCOPY OF CO-CR FILMS [J].
GRUNDY, PJ ;
ALI, M ;
FAUNCE, CA .
IEEE TRANSACTIONS ON MAGNETICS, 1984, 20 (05) :794-796
[9]   PERPENDICULAR MAGNETIC-ANISOTROPY AND MICROSTRUCTURE OF SPUTTER-DEPOSITED CO-CR FILM [J].
HONDA, N ;
AWANO, H ;
SAMOTO, T ;
HOKKYO, J .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1983, 35 (1-3) :278-280
[10]  
Hoshi Y., 1983, Transactions of the Institute of Electronics and Communication Engineers of Japan, Part C, VJ66C, P709
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