MONTE-CARLO SIMULATIONS OF MBE GROWTH OF III-V SEMICONDUCTORS - THE GROWTH-KINETICS, MECHANISM, AND CONSEQUENCES FOR THE DYNAMICS OF RHEED INTENSITY

被引:86
作者
GHAISAS, SV
MADHUKAR, A
机构
[1] UNIV SO CALIF,DEPT MAT SCI,LOS ANGELES,CA 90089
[2] UNIV SO CALIF,DEPT PHYS,LOS ANGELES,CA 90089
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 02期
关键词
D O I
10.1116/1.583173
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:540 / 546
页数:7
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