THERMAL-STABILITY OF THE CU/PD/SI METALLURGY

被引：23
|
作者：
CHANG, CA
机构：
来源：
APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 15期
关键词：
D O I：
10.1063/1.102305
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1543 / 1545
页数：3
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