共 50 条
- [31] Characterizing optical constants of thin films for vacuum ultraviolet lithography applications JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (6B): : 3684 - 3688
- [32] Characterized optical constants of thin films for vacuum ultraviolet lithography applications Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003, 2003, : 38 - 39
- [33] Characterizing optical constants of thin films for vacuum ultraviolet lithography applications Fan, W., 1600, Japan Society of Applied Physics (43):
- [34] ELLIPSOMETRICAL DETERMINATION OF THE OPTICAL-CONSTANTS OF GOLD IN THE VACUUM ULTRAVIOLET REGION REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (01): : 1450 - 1453
- [36] Optical constants of evaporated gadolinium oxide JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2001, 3 (06): : 452 - 454
- [39] Optical constants of vacuum-evaporated cadmium sulphide thin films measured by spectroscopic ellipsometry MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2000, 78 (01): : 53 - 58