DECOMPOSITION OF NH3 ON SI(111)7X7 STUDIED USING LASER-INDUCED THERMAL-DESORPTION

被引：51
作者：
KOEHLER, BG
COON, PA
GEORGE, SM
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 05期
关键词：
D O I：
10.1116/1.584476
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：1303 / 1310
页数：8
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