A HIGH-EFFICIENCY ELECTRON-BEAM-PUMPED EXCIMER KRF LASER

被引：0
|
作者：
BUCHNEV, VM
KLEMENTOV, AD
SERGEEV, PB
机构：
来源：
KVANTOVAYA ELEKTRONIKA | 1983年 / 10卷 / 10期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：2048 / 2053
页数：6
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