LASER-DIRECT-WRITING PROCESSES - METAL-DEPOSITION, ETCHING, AND APPLICATIONS TO MICROCIRCUITS

被引：19
作者：
BLACK, JG
EHRLICH, DJ
ROTHSCHILD, M
DORAN, SP
SEDLACEK, JHC
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期
关键词：
D O I：
10.1116/1.583917
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：419 / 422
页数：4
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