LASER-DIRECT-WRITING PROCESSES - METAL-DEPOSITION, ETCHING, AND APPLICATIONS TO MICROCIRCUITS

被引：19

作者：

BLACK, JG

EHRLICH, DJ

ROTHSCHILD, M

DORAN, SP

SEDLACEK, JHC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583917

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：419 / 422

页数：4

共 16 条

[1]

BAUERLE D, 1982, APPL PHYS LETT, V40, P819, DOI 10.1063/1.93272

[2] RAPID LOW-RESISTANCE INTERCONNECTS BY SELECTIVE TUNGSTEN DEPOSITION ON LASER-DIRECT-WRITTEN POLYSILICON [J].

BLACK, JG ;

EHRLICH, DJ ;

SEDLACEK, JHC ;

FEINERMAN, AD ;

BUSTA, HH .

IEEE ELECTRON DEVICE LETTERS, 1986, 7 (07) :422-424

[3]

BLACK JG, IN PRESS APPL PHYS L

[4]

EHRLICH DJ, 1984, APPL PHYS LETT, V44, P267, DOI 10.1063/1.94694

[5] LASER MICROCHEMICAL TECHNIQUES FOR REVERSIBLE RESTRUCTURING OF GATE-ARRAY PROTOTYPE CIRCUITS [J].

EHRLICH, DJ ;

TSAO, JY ;

SILVERSMITH, DJ ;

SEDLACEK, JHC ;

MOUNTAIN, RW ;

GRABER, WS .

IEEE ELECTRON DEVICE LETTERS, 1984, 5 (02) :32-35

[6]

EHRLICH DJ, 1981, APPL PHYS LETT, V39, P957, DOI 10.1063/1.92624

[7]

EHRLICH DJ, 1985, SOLID STATE TECHNOL, V28, P81

[8]

JOHNSON RW, 1986, P IEEE INT SOLID STA, P166

[9] WAFER-SCALE LASER PANTOGRAPHY .3. FABRICATION OF NORMAL-METAL-OXIDE-SEMICONDUCTOR TRANSISTORS AND SMALL-SCALE INTEGRATED-CIRCUITS BY DIRECT-WRITE LASER-INDUCED PYROLYTIC REACTIONS [J].

MCWILLIAMS, BM ;

HERMAN, IP ;

MITLITSKY, F ;

HYDE, RA ;

WOOD, LL .

APPLIED PHYSICS LETTERS, 1983, 43 (10) :946-948

[10] VISIBLE-LASER PHOTOCHEMICAL ETCHING OF CR, MO, AND W [J].

ROTHSCHILD, M ;

SEDLACEK, JHC ;

BLACK, JG ;

EHRLICH, DJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01) :414-418

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