STABILIZATION OF TETRAGONAL ZRO2 WITH AL2O3 IN REACTIVE MAGNETRON SPUTTERED THIN-FILMS

被引：24

作者：

GILMORE, CM ^{[1
]}

QUINN, C ^{[1
]}

QADRI, SB ^{[1
]}

GOSSETT, CR ^{[1
]}

SKELTON, EF ^{[1
]}

机构：

[1] USN,RES LAB,DIV CONDENSED MATTER & RADIAT SCI,WASHINGTON,DC 20375

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574925

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2085 / 2087

页数：3

共 9 条

[1]

Cevales G, 1968, BER DEUT KERAM GES, V45, P217

[2]

CEVALES G, 1975, PHASE DIAGRAMS CERAM, P135

[3] STABILIZED ZIRCONIA ALUMINA THIN-FILMS [J].

GILMORE, CM ;

QUINN, C ;

SKELTON, EF ;

GOSSETT, CR ;

QADRI, SB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2598-2600

[4]

GOSSETT CR, 1980, NUCL INSTRUM METHODS, V168, P151, DOI 10.1016/0029-554X(80)91245-8

[5] TRANSFORMATION TOUGHENING .4. FABRICATION, FRACTURE-TOUGHNESS AND STRENGTH OF AL2O3-ZRO2 COMPOSITES [J].

LANGE, FF .

JOURNAL OF MATERIALS SCIENCE, 1982, 17 (01) :247-254

[6]

LANGE FF, 1982, J MATER SCI, V17, P225, DOI 10.1007/BF00809057

[7]

LEVIN EM, 1975, PHASE DIAGRAMS CERAM, P76

[8] AXIAL THERMAL EXPANSION OF ZRO2 AND HFO2 IN RANGE ROOM TEMPERATURE TO 1400 DEGREES C [J].

PATIL, RN ;

SUBBARAO, EC .

JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1969, 2 :281-+

[9]

Stewart G. H., 1967, SCI CERAM, V3, P339

← 1 →