LOCAL-STRUCTURE OF 1.54-MU-M-LUMINESCENCE ER-3+ IMPLANTED IN SI

被引：235

作者：

ADLER, DL

JACOBSON, DC

EAGLESHAM, DJ

MARCUS, MA

BENTON, JL

POATE, JM

CITRIN, PH

机构：

[1] ATandT Bell Laboratories, Murray Hill

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 18期

关键词：

D O I：

10.1063/1.108288

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Extended x-ray absorption fine structure measurements from Er-implanted Czochralski-grown Si samples, which exhibit strong luminescence at 1.54 mum, reveal a local sixfold coordination around Er-not of Si-but of oxygen atoms at an average distance of 2.25 angstrom. By contrast, similar concentrations of Er implanted in high purity float-zone Si samples, which are essentially optically inactive, show that Er is coordinated to 12 Si atoms at a mean distance of 3.00 angstrom.

引用

页码：2181 / 2183

页数：3

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