LOCAL-STRUCTURE OF 1.54-MU-M-LUMINESCENCE ER-3+ IMPLANTED IN SI

被引：237

作者：

ADLER, DL

JACOBSON, DC

EAGLESHAM, DJ

MARCUS, MA

BENTON, JL

POATE, JM

CITRIN, PH

机构：

[1] ATandT Bell Laboratories, Murray Hill

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 18期

关键词：

D O I：

10.1063/1.108288

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Extended x-ray absorption fine structure measurements from Er-implanted Czochralski-grown Si samples, which exhibit strong luminescence at 1.54 mum, reveal a local sixfold coordination around Er-not of Si-but of oxygen atoms at an average distance of 2.25 angstrom. By contrast, similar concentrations of Er implanted in high purity float-zone Si samples, which are essentially optically inactive, show that Er is coordinated to 12 Si atoms at a mean distance of 3.00 angstrom.

引用

收藏

页码：2181 / 2183

页数：3

相关论文

共 13 条

[1] MICROSTRUCTURE OF ERBIUM-IMPLANTED SI [J].

EAGLESHAM, DJ ;

MICHEL, J ;

FITZGERALD, EA ;

JACOBSON, DC ;

POATE, JM ;

BENTON, JL ;

POLMAN, A ;

XIE, YH ;

KIMERLING, LC .

APPLIED PHYSICS LETTERS, 1991, 58 (24) :2797-2799

[2] 1.54-MU-M LUMINESCENCE OF ERBIUM-IMPLANTED III-V SEMICONDUCTORS AND SILICON [J].

ENNEN, H ;

SCHNEIDER, J ;

POMRENKE, G ;

AXMANN, A .

APPLIED PHYSICS LETTERS, 1983, 43 (10) :943-945

[3] 1.54-MU-M ELECTROLUMINESCENCE OF ERBIUM-DOPED SILICON GROWN BY MOLECULAR-BEAM EPITAXY [J].

ENNEN, H ;

POMRENKE, G ;

AXMANN, A ;

EISELE, K ;

HAYDL, W ;

SCHNEIDER, J .

APPLIED PHYSICS LETTERS, 1985, 46 (04) :381-383

[4] OPTICAL ACTIVATION OF ER-3+ IMPLANTED IN SILICON BY OXYGEN IMPURITIES [J].

FAVENNEC, PN ;

LHARIDON, H ;

MOUTONNET, D ;

SALVI, M ;

GAUNEAU, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (04) :L524-L526

[5] EXTENDED X-RAY ABSORPTION FINE-STRUCTURE - ITS STRENGTHS AND LIMITATIONS AS A STRUCTURAL TOOL [J].

LEE, PA ;

CITRIN, PH ;

EISENBERGER, P ;

KINCAID, BM .

REVIEWS OF MODERN PHYSICS, 1981, 53 (04) :769-806

[6] A SOFT HARD X-RAY BEAMLINE FOR SURFACE EXAFS STUDIES IN THE ENERGY-RANGE 0.8-15 KEV [J].

MACDOWELL, AA ;

HASHIZUME, T ;

CITRIN, PH .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07) :1901-1904

[7] LOCAL-STRUCTURE AROUND ER IN SILICA AND SODIUM-SILICATE GLASSES [J].

MARCUS, MA ;

POLMAN, A .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1991, 136 (03) :260-265

[8]

MASTEROV VF, 1990, SOV PHYS SEMICOND+, V24, P383

[9] STRUCTURE TYPES OF TERNARY RARE-EARTH - TRANSITION-METAL SILICIDES OF LNMXSI2-X TYPE [J].

MAYER, I ;

FELNER, I .

JOURNAL OF SOLID STATE CHEMISTRY, 1973, 7 (03) :292-296

[10] IMPURITY ENHANCEMENT OF THE 1.54-MU-M ER3+ LUMINESCENCE IN SILICON [J].

MICHEL, J ;

BENTON, JL ;

FERRANTE, RF ;

JACOBSON, DC ;

EAGLESHAM, DJ ;

FITZGERALD, EA ;

XIE, YH ;

POATE, JM ;

KIMERLING, LC .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (05) :2672-2678