RBS AND NUCLEAR-REACTION ANALYSIS OF BORON IMPLANTED COPPER

被引：12

作者：

HENRIKSEN, O

LAURSEN, T

JOHNSON, E

JOHANSEN, A

SARHOLTKRISTENSEN, L

WHITTON, JL

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期

关键词：

D O I：

10.1016/0168-583X(86)90321-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：356 / 360

页数：5

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