VACUUM-SYSTEMS FOR MICROELECTRONICS

被引：0

作者：

WAITS, RK

机构：

[1] IBM, Thomas J. Watson Research Cent,, Yorktown Heights, NY, USA, IBM, Thomas J. Watson Research Cent, Yorktown Heights, NY, USA

来源：

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：93 / 93

页数：1

共 50 条

[1] VACUUM-SYSTEMS FOR MICROELECTRONICS
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