MICROFABRICATION AND OPTICAL STUDY OF REACTIVE ION ETCHED INGAASP/INP AND GAAS/GAALAS QUANTUM WIRES

被引:51
作者
IZRAEL, A
SERMAGE, B
MARZIN, JY
OUGAZZADEN, A
AZOULAY, R
ETRILLARD, J
THIERRYMIEG, V
HENRY, L
机构
[1] CNRS,MICROSTRUCT & MICROELECTR LAB,F-92220 BAGNEUX,FRANCE
[2] CTR NATL ETUD TELECOMMUN,F-22301 LANNION,FRANCE
关键词
D O I
10.1063/1.102676
中图分类号
O59 [应用物理学];
学科分类号
摘要
Microfabrication of reactive ion etched InGaAsP/InP and GaAs/GaAlAs quantum wire structures with dimensions down to 30 nm has been achieved. From time-resolved photoluminescence, the importance of surface recombination effects is outlined in both systems. It is shown that the use of epitaxial overgrowth leads to a significant increase of the carrier lifetime in GaAs/GaAlAs wires, so that emission of very narrow wires (width<40 nm) can be detected. The possible assignment of the observed shifts of the cw photoluminescence peak energies to additional lateral confinement effects is discussed.
引用
收藏
页码:830 / 832
页数:3
相关论文
共 17 条
[1]  
ARNOT HEG, 1989, SUPERLATT MICROSTRUC, V4, P459
[2]   THEORETICAL GAIN OF QUANTUM-WELL WIRE LASERS [J].
ASADA, M ;
MIYAMOTO, Y ;
SUEMATSU, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (02) :L95-L97
[3]   OPTICALLY DETECTED CARRIER CONFINEMENT TO ONE AND ZERO DIMENSION IN GAAS QUANTUM-WELL WIRES AND BOXES [J].
CIBERT, J ;
PETROFF, PM ;
DOLAN, GJ ;
PEARTON, SJ ;
GOSSARD, AC ;
ENGLISH, JH .
APPLIED PHYSICS LETTERS, 1986, 49 (19) :1275-1277
[4]  
HANSEN W, 1988, SPRINGER SERIES SOLI, V83, P187
[5]   NOVEL PROCESS FOR INTEGRATION OF OPTOELECTRONIC DEVICES USING REACTIVE ION ETCHING WITHOUT CHLORINATED GAS [J].
HENRY, L ;
VAUDRY, C ;
GRANJOUX, P .
ELECTRONICS LETTERS, 1987, 23 (24) :1253-1254
[6]  
HIRAYAMA Y, 1988, PHYS REV B, V37, P2744
[7]  
ISRAEL A, P ME89 C
[8]   OPTICAL SPECTROSCOPY OF ULTRASMALL STRUCTURES ETCHED FROM QUANTUM-WELLS [J].
KASH, K ;
SCHERER, A ;
WORLOCK, JM ;
CRAIGHEAD, HG ;
TAMARGO, MC .
APPLIED PHYSICS LETTERS, 1986, 49 (16) :1043-1045
[9]  
Leier H., 1989, Microelectronic Engineering, V9, P361, DOI 10.1016/0167-9317(89)90079-8
[10]  
MAILE BE, 1989, APPL PHYS LETT, V54, P1522