INTERFACIAL REACTIONS OF TITANIUM THIN-FILMS ON BF+(2)-IMPLANTED (001)SI

被引：29
作者：
LUR, W
CHEN, LJ
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 08期
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D O I：
10.1063/1.344067
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：3604 / 3611
页数：8
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