AMORPHIZATION OF HF-NI FILMS BY SOLID-STATE REACTION

被引:98
作者
VANROSSUM, M
NICOLET, MA
JOHNSON, WL
机构
来源
PHYSICAL REVIEW B | 1984年 / 29卷 / 10期
关键词
D O I
10.1103/PhysRevB.29.5498
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:5498 / 5503
页数:6
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