AMORPHIZATION OF HF-NI FILMS BY SOLID-STATE REACTION

被引：98

作者：

VANROSSUM, M

NICOLET, MA

JOHNSON, WL

机构：

来源：

PHYSICAL REVIEW B | 1984年 / 29卷 / 10期

关键词：

D O I：

10.1103/PhysRevB.29.5498

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：5498 / 5503

页数：6

共 12 条

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