AMORPHIZATION OF HF-NI FILMS BY SOLID-STATE REACTION

被引：98
|
作者：
VANROSSUM, M
NICOLET, MA
JOHNSON, WL
机构：
来源：
PHYSICAL REVIEW B | 1984年 / 29卷 / 10期
关键词：
D O I：
10.1103/PhysRevB.29.5498
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：5498 / 5503
页数：6
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