ANNEALING EFFECT IN PHOSPHORUS-DOPED POLYCRYSTALLINE SILICON

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作者
GNADINGER, AP [1 ]
KOSICKI, BB [1 ]
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[1] BELL TEL LABS INC, ALLENTOWN, PA 18103 USA
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O646 [电化学、电解、磁化学];
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081704 ;
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页码:C87 / C87
页数:1
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