ON THE INTRINSIC STRESS IN THIN CHROMIUM FILMS

被引：27
作者：
JANDA, M
机构：
来源：
THIN SOLID FILMS | 1986年 / 142卷 / 01期
关键词：
D O I：
10.1016/0040-6090(86)90301-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：37 / 45
页数：9
相关论文
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