SMOOTHING OF DIAMOND FILMS WITH AN ARF LASER

Polycrystalline diamond films of various microstructures were modified by large-area ArF laser irradiation. The modified film surfaces were characterized employing electron microscopy, mechanical profilometry and optical reflectometry. Laser irradiation was found to smooth the surface finish over a wide range of spatial frequencies covering microroughness imposed by the individual crystallites as well as waviness with periods exceeding the crystal sizes. No smoothening was achieved, however, for chemically non-uniform diamond films. The results can be rationalized in terms of laser-induced surface evaporation. Resistivity measurements revealed the simultaneous formation of a highly stable conductive surface layer upon laser irradiation. © 1992.