RESIDUAL-STRESS IN COATED LOW-Z FILMS OF TIC AND TIN .2. CORRELATION OF RESIDUAL-STRESS WITH MICROSTRUCTURE

被引:1
|
作者
YOSHIZAWA, I [1 ]
KABEYA, Z [1 ]
KAMADA, K [1 ]
机构
[1] NAGOYA UNIV,INST PLASMA PHYS,CHIKUSA KU,NAGOYA,AICHI 464,JAPAN
关键词
D O I
10.1016/0022-3115(84)90261-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:1315 / 1319
页数:5
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