DETECTABILITY LIMITS FOR BORON AND PHOSPHORUS IN SILICON BY AUGER-ELECTRON SPECTROSCOPY (AES)

被引：16

作者：

THOMAS, JH

MORABITO, JM

机构：

[1] BELL TEL LABS INC,COLUMBUS,OH

[2] BELL TEL LABS INC,ALLENTOWN,PA 18103

来源：

SURFACE SCIENCE | 1974年 / 41卷 / 02期

关键词：

D O I：

10.1016/0039-6028(74)90083-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：629 / 633

页数：5

共 50 条

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