AMORPHOUS HYDROGENATED CARBON-FILMS ON SEMICONDUCTORS .2. MICROSTRUCTURAL PROPERTIES OF THE INTERFACE

被引：22
|
作者：
WITTMER, M [1 ]
UGOLINI, D [1 ]
EITLE, J [1 ]
OELHAFEN, P [1 ]
机构：
[1] UNIV BASEL,INST PHYS,CH-4056 BASEL,SWITZERLAND
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 48卷 / 06期
关键词：
D O I：
10.1007/BF00617857
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：559 / 566
页数：8
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