OPTICAL CHARACTERIZATION OF POLYCRYSTALLINE SILICON BEFORE AND AFTER THERMAL-OXIDATION

被引：12
作者：
MONTAUDON, P
DEBROUX, MH
FERRIEU, F
VAREILLE, A
机构：
来源：
THIN SOLID FILMS | 1985年 / 125卷 / 3-4期
关键词：
D O I：
10.1016/0040-6090(85)90227-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：235 / 241
页数：7
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