INTERACTION OF DEUTERIUM GAS WITH DRY SIO2 ON SI - AN ION-BEAM STUDY

被引：57
作者：
MYERS, SM
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 12期
关键词：
D O I：
10.1063/1.338284
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：5428 / 5437
页数：10
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