MICROSTRUCTURE EVOLUTION IN TIN FILMS REACTIVELY SPUTTER DEPOSITED ON MULTIPHASE SUBSTRATES

被引：72
作者：
HELMERSSON, U
SUNDGREN, JE
GREENE, JE
机构：
[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
[3] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词：
D O I：
10.1116/1.573868
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：500 / 503
页数：4
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