SURFACE STUDIES ON AS-DEPOSITED A-SI-H FILMS

被引：3
作者：
FOLLER, M
HERION, J
BEYER, W
WAGNER, H
机构：
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1985年 / 77-8卷
关键词：
D O I：
10.1016/0022-3093(85)90824-5
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：979 / 982
页数：4
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