CHARACTERIZATION OF THE TREATED SURFACES OF SILICON ALLOYED PYROLYTIC CARBON AND SIC

被引：165

作者：

SMITH, KL ^{[1
]}

BLACK, KM ^{[1
]}

机构：

[1] ST JUDE MED INC,ST PAUL,MN 55117

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572562

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：744 / 747

页数：4

共 16 条

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[9] X-RAY PHOTOELECTRON-SPECTROSCOPY AND AUGER-ELECTRON SPECTROSCOPY STUDIES OF GLOW-DISCHARGE SI1-XCX-H FILMS [J].

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