EFFECT OF OXYGEN ON THE PHYSICAL PARAMETERS OF RF SPUTTERED ZNO THIN-FILM

被引：15
|
作者：
SRIVASTAV, S [1 ]
KUMAR, CVRV [1 ]
MANSINGH, A [1 ]
机构：
[1] UNIV DELHI,DEPT PHYS & ASTROPHYS,DELHI 110007,INDIA
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1989年 / 22卷 / 11期
关键词：
D O I：
10.1088/0022-3727/22/11/032
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1768 / 1772
页数：5
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