NEW PREPARATION METHOD FOR LARGE AREA ELECTRON-TRANSPARENT SILICON SAMPLES

被引：30

作者：

KOLBESEN, BO ^{[1
]}

MAYER, KR ^{[1
]}

SCHUH, GE ^{[1
]}

机构：

[1] SIEMENS AG,GRUNDLAGENENTWICKL HALBLEITER,POB 460705,8 MUNICH 46,FED REP GER

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1975年 / 8卷 / 03期

关键词：

D O I：

10.1088/0022-3735/8/3/015

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：197 / 199

页数：3

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[9]

SIRTL E, 1961, Z METALLKD, V52, P529

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