DIRECT ION-BEAM DEPOSITION FOR THIN-FILM FORMATION

被引：14
作者：
AMANO, J
机构：
来源：
THIN SOLID FILMS | 1982年 / 92卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(82)90193-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：115 / 122
页数：8
相关论文
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