High synchronization absolute distance measurement using a heterodyne and superheterodyne combined interferometer

被引:0
|
作者
殷子淇 [1 ,2 ]
李芳妃 [1 ,2 ]
孙云科 [1 ,2 ]
邹运 [1 ,2 ]
王彦 [1 ,2 ]
杨宏兴 [1 ,2 ]
胡鹏程 [1 ,2 ]
付海金 [1 ,2 ]
谭久彬 [1 ,2 ]
机构
[1] Center of Ultra-precision Optoelectronic Instrument,Harbin Institute of Technology
[2] Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology),Ministry of Industry and Information Technology
基金
中国国家自然科学基金;
关键词
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暂无
中图分类号
TH744.3 [];
学科分类号
0803 ;
摘要
We propose an absolute distance measurement method that employs heterodyne and superheterodyne combined interferometers to achieve synchronous detection and demodulation of multiwavelengths. Coarse and fine synthetic wavelengths are generated by a dual-longitudinal-mode He–Ne laser and four acoustic optical frequency shifters. Further,to improve phase synchronization measurement for multiwavelengths, we analyze the demodulation characteristics of coarse and fine measurement signals and adopt a demodulation method suitable for both signals. Experimental results demonstrate that the proposed method can achieve high-precision synchronous demodulation of multiwavelengths, and standard deviation is 1.7 × 10-5m in a range of 2 m.
引用
收藏
页码:52 / 56
页数:5
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