Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing

被引：5

作者：

Qilin Jiang ^{[1
]}

Long Chen ^{[1
]}

Jukun Liu ^{[1
]}

Yuchan Zhang ^{[1
]}

Shian Zhang ^{[1
]}

Donghai Feng ^{[1
]}

Tianqing Jia ^{[1
,2
]}

Peng Zhou ^{[3
]}

Qian Wang ^{[3
]}

Zhenrong Sun ^{[1
]}

Hongxing Xu ^{[1
]}

机构：

[1] State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University

[2] Collaborative Innovation Center of Extreme Optics,Shanxi University

[3] Huawei Technologies Co, Ltd.

来源：

Opto-Electronic Science | 2023年 / 2卷 / 01期

基金：

中国国家自然科学基金;

关键词：

D O I：

暂无

中图分类号：

TN249 [激光的应用]; O484 [薄膜物理学];

学科分类号：

0803 ; 080401 ; 080501 ; 080901 ; 1406 ;

摘要：

This paper reports the fabrication of regular large-area laser-induced periodic surface structures(LIPSSs) in indium tin oxide(ITO) films via femtosecond laser direct writing focused by a cylindrical lens. The regular LIPSSs exhibited good properties as nanowires, with a resistivity almost equal to that of the initial ITO film. By changing the laser fluence, the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of ±10%. Furthermore, the average transmittance of the ITO films with regular LIPSSs in the range of 1200–2000 nm was improved from 21% to 60%. The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices—particularly in the near-infrared band.

引用

页码：15 / 27

页数：13

共 41 条

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