Non-lithographic fabrication of metallic micromold masters by laser machining and welding

被引:0
|
作者
Pun-Pang Shiu
George K. Knopf
Mile Ostojic
Suwas Nikumb
机构
[1] The University of Western Ontario,Department of Mechanical and Materials Engineering
[2] Industrial Materials Institute,undefined
[3] National Research Council of Canada,undefined
来源
The International Journal of Advanced Manufacturing Technology | 2012年 / 59卷
关键词
Lab-on-a-chip; Microfluidics; Mold masters; Microfabrication; Laser machining; Microwelding; Soft molding; Hot embossing;
D O I
暂无
中图分类号
学科分类号
摘要
A non-lithographic process of rapidly fabricating metallic micromold masters for the manufacture of disposable polymer microfluidic devices is presented in this paper. The developed technique exploits the precision material removal capabilities of industrial lasers to cut accurate profiles of microfeatures (e.g., liquid flow microchannels, reservoirs, passive micromixers) from thin metallic sheets. The machined micropatterns are then laser welded onto a metal substrate to form the final functional mold master. Multiple versions of the functional device are replicated from the assembled master by either soft molding polydimethylsiloxane or hot embossing polymethyl methacrylate. Several metallic micromold masters and polymer replicas are tested for dimensional accuracy and surface roughness to verify the developed microfabrication process.
引用
收藏
页码:157 / 167
页数:10
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