Theoretical analysis of impurity precipitation in nanopores in crystals. II: Kinetics of impurity cluster growth in pores

被引:0
|
作者
M. N. Lubov
D. V. Kulikov
Yu. V. Trushin
O. Kurnosikov
机构
[1] St. Petersburg Academic University,Nanotechnology Research and Education Centre
[2] Russian Academy of Sciences,Ioffe Physical Technical Institute
[3] Russian Academy of Sciences,undefined
[4] Eindhoven University of Technology,undefined
来源
Technical Physics | 2013年 / 58卷
关键词
Cobalt; Deep Layer; Impurity Atom; Impurity Phase; Copper Sample;
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中图分类号
学科分类号
摘要
The kinetics of the formation of impurity clusters in subsurface nanopores in crystals is studied theoretically. A physical model of precipitation of the impurity phase in nanopores in a sample with sinks of various types is developed. This model forms the basis for the calculation of the annealing kinetics of copper containing subsurface pores and cobalt impurity atoms. The optimal annealing conditions are determined in which cobalt atoms diffuse predominantly into pores and form impurity clusters in them.
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页码:335 / 339
页数:4
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