Fabrication of a biocompatible flexible electroosmosis micropump

In in-vivo microsystems, one of the components is a biocompatible micropump in order to produce the necessary force to deliver the fluid from the inlet to the outlet. In this contribution, a flexible micropump is fabricated which is aimed to be suitable in drug delivery applications. It provides high degree of biocompatibility, since the only employed materials are implantation grade polydimethylsiloxane elastomer and gold for the electrical interconnects. The working principle of the micropump is based on transverse DC electroosmosis which is a new variant of conventionally applied high voltage DC electroosmosis. This new technique is based on topography irregularities introduced in the channel resulting in a non-uniform charge distribution. The advantage is to drive the micropump using a relatively low DC voltage of 10 V while getting an effective flow speed of 60 μm/s. In order to characterize the flow speed, dyed 3 μm beads are dispersed in the working fluid and their speed is measured by the line scanning technique using a confocal microscope. It is also observed that the flow has a helical profile which is an attractive feature for an efficient micro-mixer in active microfluidics and μ-TAS applications.