Synthesis of carbon nanotubes by ECR plasma-assisted chemical vapor deposition

被引：0

作者：

S.K. Patra

G. Mohan Rao

机构：

[1] Department of Instrumentation,Indian Institute of Science

来源：

Applied Physics A | 2005年 / 80卷

关键词：

Carbon Nanotubes; Electron Cyclotron Resonance; Plasma Chemical Vapor Deposition; Electron Cyclotron Resonance Plasma; Grow Carbon Nanotubes;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Carbon nanotubes have been grown using an electron cyclotron resonance (ECR) plasma source at a substrate temperature of 500 °C. Methane has been used as the source gas. A network of carbon nanotubes has been observed in scanning electron microscopy. Transmission electron microscopy revealed that the structure consists of straight, Y-junction and ring-like nanotubes. Further, electron diffraction of the nanotubes confirms a graphite crystal structure.

引用

页码：1113 / 1115

页数：2