Holographic Femtosecond Laser Processing with Multiplexed Phase Fresnel Lenses Displayed on a Liquid Crystal Spatial Light Modulator

Parallel femtosecond laser processing with a computer-generated hologram displayed on a spatial light modulator (SLM) is demonstrated. Use of the SLM enables performance of an arbitrary and variable patterning in laser processing. The hologram uses multiplexed phase Fresnel lenses (MPFLs) with features of independent tunability, three-dimensional (3D) parallelism of the diffraction peaks, optimization of the hologram with low computational costs, and low contribution of zero-order light to the processing. To make uniform the reconstructed diffraction peaks, an MPFL is optimized by changing the center phase and size of each phase Fresnel lens while taking account of the intensity distribution of the irradiated laser pulse and the spatial frequency response of an SLM. Using the holographic technique, two-dimensional parallel processing with a single-pulse irradiation of glass is demonstrated and the processing performance is analyzed.