Measurement of shock waves velocity in the air plasma of capacitively coupled RF discharge

被引：0

作者：

A.E. Dubinov

S.A. Sadovoy

V.D. Selemir

机构：

[1] Moscow Engineer Physical Institute,

[2] Branch No. 4,undefined

[3] Sarov (Arzamas-16),undefined

[4] Russia,undefined

[5] Russian Federal Nuclear Center - All-Russia Scientific Research Institute of Experimental Physics,undefined

[6] Sarov (Arzamas-16),undefined

[7] Russia,undefined

来源：

Shock Waves | 2000年 / 10卷

关键词：

Key words: Shock wave, Capacitively coupled RF discharge, Charged particle concentration;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The velocity of shock wave propagation in the air plasma of stationary capacitively coupled RF discharge at different gas pressure and charged particles concentration has been measured. It is shown, that the velocity of the shock wave increases at the increase of the concentration. Measurement results are brought to the universal dependence.

引用

页码：73 / 76

页数：3