Pull-in instability and vibration of quasicrystal circular nanoplate actuator based on surface effect and nonlocal elastic theory

With excellent electrical and mechanical properties, multi-layer structures containing quasicrystals (QCs) have gradually used in the new generation of information technology and semiconductor fields. Currently most studies on QC nanostructures focus on static rather than dynamic behaviors. Based on the nonlocal theory and Gurtin–Murdoch surface elasticity, a dynamic model of nano-QC circular plate actuator under electromechanical loads is established. The plates are clamp-supported around and the electrostatic and Casimir forces between the plates are considered in this paper. When the applied voltage reaches a certain value, the deformation of the plate will suddenly increase sharply and become unstable. The numerical solution of the governing equation is obtained by using the generalized differential quadrature method. The instability deformation, the frequency, and electrostatic driving voltage of the nanoplate with different nonlocal parameters and machining residual stress are discussed. The results show that the sensitivities of circular plates with different geometric parameters and material constants characterizing the nanoscale effect are different.