Improvement in Surface Quality of Microchannel Structures Fabricated by Revolving Tip-Based Machining

被引：15

作者：

Xue B. ^{[1
]}

Geng Y. ^{[1
,2
]}

Wang D. ^{[2
]}

Sun Y. ^{[2
]}

Yan Y. ^{[1
,2
,3
]}

机构：

[1] Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin, 150001, Heilongjiang

[2] Center for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, Heilongjiang

[3] Harbin Institute of Technology, P.O. Box 413, Harbin, 150001, Heilongjiang

来源：

Nanomanufacturing and Metrology | 2019年 / 2卷 / 1期

基金：

中国国家自然科学基金;

关键词：

Microchannel structures; Process parameter optimization; Revolving tip-based machining; Surface roughness;

D O I：

10.1007/s41871-018-0032-9

中图分类号：

学科分类号：

摘要：

In the present paper, the process parameters of revolving tip-based machining were optimized for the fabrication of microchannel structures. It was found that in comparison with the micromilling process, the main factor affecting the surface quality of revolving tip-based machining originated from residual materials produced in each revolution. Three process parameters, including cutting depth, feeding rate, and tool path strategy, were studied experimentally to optimize the surface quality of the machined aluminum alloy and polymethylmethacrylate (PMMA). It was noticed that at smaller cutting depths (< 3 µm) and feeding rates (< 20 µm/s) with fixed revolving parameters (50 Hz frequency and 6 µm radius), microchannels with better bottom surfaces were formed. Two different types of tool path strategies were designed and compared to obtain the best surface quality (Sa) of aluminum alloy (21 nm) and PMMA (19 nm). © 2018, International Society for Nanomanufacturing and Tianjin University and Springer Nature.

引用

页码：26 / 35

页数：9

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