Improve the Performance of a Novel Capacitive Shunt RF MEMS Switch by Beam and Dielectric Materials

This paper deals with design and simulation of RF MEMS Shunt type switch having non-uniform meanders. The device is optimized and done various electromechanical and RF performance analysis in the COMSOL multiphysics and HFSS tools. By varying the thickness of beam, gap and changing the beam materials such as Gold, Copper, Nickel, we done simulation and calculation of spring constant, pull-in voltage, capacitance analysis of the proposed switch. Out of all these different materials, Gold is best by its material properties. The pull-in voltage of proposed switch is 16.9 V, the switch have fast switching time i.e. 1.2 µs. The capacitance analysis like Up state and down state capacitance of the proposed switch is 7.46 fF and 1.25 pF. The RF-Performance of the proposed switch exhibits at low frequencies (2–12 GHz). The return and insertion loss are carried out by proposed switch is − 41.55 dB, − 0.0865 dB respectively. The switch having good isolation is − 47.70 dB at 5 GHz. The proposed shunt type switch is used for low frequencies such as microphones, radar and satellite applications.