The effect of surface roughness of seed on the high-rate homoepitaxial growth of CVD single-crystal diamonds

被引:0
作者
Yanyan Zhang
Dongliang Zhang
Libin Zhang
Bo Yang
Shengnan Shen
Zhiyin Gan
机构
[1] Huazhong University of Science and Technology,School of Mechanical Science and Engineering
[2] Wuhan Textile University,School of Mechanical Engineering and Automation
[3] University of Science and Technology of China,CAS Center for Excellence in Quantum Information and Quantum Physics
[4] University of Science and Technology of China,CAS Key Laboratory of Microscale Magnetic Resonance and School of Physical Sciences
[5] Wuhan University,School of Power and Mechanical Engineering
[6] Wuhan University Shenzhen Research Institute,undefined
[7] TrueOne Semiconductor Technology Company Ltd,undefined
来源
Applied Physics A | 2023年 / 129卷
关键词
Surface roughness; Diamond seed; MPCVD; Diamond growth;
D O I
暂无
中图分类号
学科分类号
摘要
Although diamond seeds are generally polished before growth, the effect of surface roughness of diamond seeds on crystal growth quality is rarely studied. In this research, three diamond seeds were prepared for researching the effect of surface roughness of diamond seed. They were made by cutting a bulk diamond and subsequently suffered partially polished, totally polished and unpolished, respectively. After a period of microwave plasma chemical vapor deposition growth, various tests were carried out on the samples. According to the microscope and step profiler, the surface roughness of diamond seed did not affect the surface roughness of long-term growth diamonds. Compared by Raman spectra, ultraviolet − visible and infra-red spectra, it indicated that a certain rough surface of diamond seed could improve the internal stress of diamond, but reduce the crystalline quality slightly. Moreover, the surface roughness had almost no impact on the optical properties of the diamond. As a result, diamond seeds with low roughness after cutting could be used for direct growth without polishing, bringing on significant economic for gem-quality diamond production.
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