Microstructure and magnetic properties of CoFe2O4 thin films deposited on Si substrates with an Fe3O4 under-layer

被引:0
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作者
ZhiYong Zhong
HuaiWu Zhang
XiaoLi Tang
YuLan Jing
FeiMing Bai
Shuang Liu
机构
[1] University of Electronic Science and Technology of China,State Key Laboratory of Electronic Thin Films and Integrated Devices
[2] University of Electronic Science and Technology of China,School of Optoelectronic Information
来源
Science China Physics, Mechanics and Astronomy | 2011年 / 54卷
关键词
magnetic materials; magnetic thin films; cobalt ferrite;
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学科分类号
摘要
The microstructure and magnetic properties of cobalt ferrite thin films deposited by the sputtering method on an Fe3O4 under-layer were investigated at different post-annealing temperatures. Results show that the Fe3O4 under-layer can accelerate the grain growth of cobalt ferrite films due to the phase transformation of the Fe3O4 under-layer at about 400°C–500°C. By introducing the Fe3O4 under-layer, cobalt ferrite nanocrystalline thin films with high coercivity can be obtained at lower post-annealing temperatures.
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