A Compact High-Voltage Pulse Generator for Plasma Applications

被引:0
作者
V.A. Spassov
J. Barroso
M. Ueda
L. Guerguiev
机构
[1] National Institute for Space Research (INPE),Associated Plasma Laboratory (LAP)
[2] Wayne State University,undefined
关键词
Output Voltage; Pulse Generator; Pulse Length; Beam Power; Pulse Repetition Frequency;
D O I
10.1023/A:1001123221816
中图分类号
学科分类号
摘要
The design and construction of a compact high-voltage pulse generator for providing input electron beam power for the LAP/INPE 32 GHz gyrotron and for treatment of metal and polymer materials by plasma immersion ion implantation (PIII) are described. The generator was built on a circuit category of Pulse Forming Network (PFN), consisting of nine LC sections with L = 270 μH and C = 2.5 nF.
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页码:533 / 538
页数:5
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  • [1] Chaltakov I.V.(1988)undefined J. Physics E; Sci. Instruments 21 663-undefined