Microwave Low-Pressure Gas Discharge Sustained by a Standing Surface Wave in the Dipolar Mode

被引：0

作者：

V. I. Zhukov

D. M. Karfidov

机构：

[1] Prokhorov Institute of General Physics,

[2] Russian Academy of Sciences,undefined

来源：

Plasma Physics Reports | 2023年 / 49卷

关键词：

surface electromagnetic wave; low temperature plasma; low-pressure microwave discharge; standing surface wave; resonance; surface wave dispersion;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：219 / 228

页数：9

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